MEMS and MOEMS technology and applications
Material type: TextPublication details: New delhi : PHI learning Pri, Lit, 2009Description: xi, 520 p . ; 25 * 18 cmISBN: 9788120337527Subject(s): Fabrication | Micromechanics | Wafer | SiliconDDC classification:Item type | Current library | Call number | Status | Date due | Barcode |
---|---|---|---|---|---|
Books | Bangalore University Library Stack ML | CHO (Browse shelf (Opens below)) | Available | G025515 |
It includes index
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