MEMS and MOEMS technology and applications
MEMS and MOEMS technology and applications
- New delhi : PHI learning Pri, Lit, 2009.
- xi, 520 p . ; 25 * 18 cm.
It includes index
9788120337527
Fabrication
Micromechanics
Wafer
Silicon
/ CHO
It includes index
9788120337527
Fabrication
Micromechanics
Wafer
Silicon
/ CHO