MEMS and MOEMS technology and applications

Contributor(s): Choudhurt, Rai P [editor]Material type: TextTextPublication details: New delhi : PHI learning Pri, Lit, 2009Description: xi, 520 p . ; 25 * 18 cmISBN: 9788120337527Subject(s): Fabrication | Micromechanics | Wafer | SiliconDDC classification:
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