Mems and moems technology and applications

By: Choudhury, Rai PMaterial type: TextTextPublication details: New Delhi : PHI Learning pvt. ltd., 2009Description: xi, 520 p, ; 22 * 20 cmISBN: 9788120337527Subject(s): Mems /Moems technology | Operation and design | Digital micromirror device | Assembly | Silicon micromachinesDDC classification: 621.381
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It Includes index

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