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Mems and moems technology and applications

Choudhury, Rai P

Mems and moems technology and applications - New Delhi : PHI Learning pvt. ltd., 2009. - xi, 520 p, ; 22 * 20 cm.

It Includes index

ISBN: 9788120337527

Subjects--Topical Terms:
Mems /Moems technology
Operation and design
Digital micromirror device
Assembly
Silicon micromachines

Dewey Class. No.: 621.381 / CHO

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