| 000 | 00470pam a2200205a 44500 | ||
|---|---|---|---|
| 001 | 123543 | ||
| 008 | 150403b2004 xxu||||| |||| 00| 0 eng d | ||
| 040 |
_aBangalore University _cBangalore University |
||
| 082 |
_a _b |
||
| 245 | 0 | 0 |
_aFundamentals of Semiconductor Fabrication _c |
| 250 | 0 | 0 | _a |
| 300 | 0 | 0 | _a |
| 510 | 0 | 0 | _a |
| 100 | 0 | 0 | _aMay, Gary S |
| 902 | 0 | 0 |
_a _b |
| 901 | 0 | 0 | _a |
| 500 | 0 | 0 | _a |
| 260 | 0 | 0 |
_bJohn Wiley &Sons, Inc. _aNew York _c2004 |
| 906 | _a | ||
| 999 |
_c80398 _d80398 |
||