| 000 | 00421nam a22001577a 4500 | ||
|---|---|---|---|
| 008 | 240911b |||||||| |||| 00| 0 eng d | ||
| 020 | _a9780444516169 | ||
| 082 |
_a621.381 _bBAO |
||
| 100 | _aBao, Minhang | ||
| 245 | _aAnalysis and Design Principles of MEMS Devices | ||
| 260 |
_aNew York: _bElsevier Education, _c2005 |
||
| 300 |
_axii, 312p. _c23cm. |
||
| 504 | _aindex | ||
| 563 | _aHeard Binding | ||
| 942 | _cBK | ||
| 999 |
_c284770 _d284770 |
||