000			00626nam a22002177a 4500
008			230908b |||||||| |||| 00| 0 eng d
020			_a0-471-41452-2
082			_a670.42 _bWEL N
100			_aWelker, R. W.
245			_aContamination and ESD control in high-technology manufacturing
260			_aNew Jersey: _bJohn Wiley & sons, _c2006
300			_axvi, 498p. _c24cm.
504			_aIndex
563			_aRough binding
650			_aFundamentals of ESD control
650			_aFacilities design
650			_aSampling and analysis methods
700			_aNagarajan, R.
700			_aNewberg, Carl E.
942			_cBK
999			_c282011 _d282011