| 000 | 00557nam a22001817a 4500 | ||
|---|---|---|---|
| 008 | 220525b |||||||| |||| 00| 0 eng d | ||
| 020 | _a9788120337527 | ||
| 082 |
_a621 RC _bG799 |
||
| 100 | _aChoudhury Rai P | ||
| 245 | _aMEMS AND MOEMS TECHNOLOGY AND APPLICATIONSY | ||
| 260 |
_a:phi learning pvt;New Delhi _bASHOK K GHOSH _c2009 |
||
| 300 |
_a12cm _c14cm _f1 _g520 |
||
| 440 | _6mems and moems technology and applications | ||
| 490 | _6introduction | ||
| 490 | _6basic silicon device fabrication steps | ||
| 504 | _aindecx ,content | ||
| 942 | _cBK | ||
| 999 |
_c270208 _d270208 |
||