| 000 | 00473nam a22001457a 4500 | ||
|---|---|---|---|
| 008 | 180515b2002 xxu||||| |||| 00| 0 eng d | ||
| 020 | _a9780070487093 | ||
| 082 |
_a621.381 _bHSU |
||
| 100 | _a Hsu, Tai-Ran | ||
| 245 |
_aMEMS and microsystems : _bdesign and manufacture _cTai-Ran Hsu |
||
| 260 |
_aNew Delhi: _bMcgrawhill education pvt,Ltd. _c2016. |
||
| 300 |
_axii,436 p. _c26 cm. |
||
| 504 | _a"It includes bibliographical references(427-436) and index" | ||
| 942 | _cBK | ||
| 999 |
_c250905 _d250905 |
||