000 00567nam a2200217 4500
008 150813b2003 xxu||||| |||| 00| 0 eng d
020 _a9788126529919
082 _a621.38413
_bVAR
100 _aVaradan, Vijay K
245 _aRF Mems and their applications
260 _aNew delhi :
_bWiley India Pvt. Ltd.,
_c2011.
300 _axii, 394 p.
_c24 cm.
563 _aOB
650 _aElectronic science
650 _aMEMS
650 _aMicrofabrication
650 _aElectromechanical
700 _aVinoy, K J.
700 _aJose, K A
942 _2ddc
_cBK
999 _c127206
_d127206