TY  - BOOK
AU  - Choudhurt, Rai P
TI  - MEMS and  MOEMS technology and applications
SN  - 9788120337527
PY  - 2009///
CY  - New delhi
PB  - PHI learning Pri, Lit, 
KW  - Fabrication
KW  - Micromechanics
KW  - Wafer
KW  - Silicon
N1  - It includes index
ER  -