TY  - BOOK
AU  - Welker, R. W.
AU  - Nagarajan, R.
AU  - Newberg, Carl E.
TI  - Contamination and ESD control in high-technology manufacturing
SN  - 0-471-41452-2
U1  - 670.42 
PY  - 2006///
CY  - New Jersey
PB  - John Wiley & sons, 
KW  - Fundamentals of ESD control
KW  - Facilities design
KW  - Sampling and analysis methods
N1  - Index
ER  -