TY  - BOOK
AU  - Fujita, H.
TI  - Micromachines as Tools for Nanotechnology
SN  - 978-81-8128-202-6
U1  - 620.521 
PY  - 2003///
CY  - New Delhi
PB  - Springer Private Limited
KW  - Microsystem's
N1  - Index
ER  -