TY  - BOOK
AU  - Campbell, Stephen A.
TI  - THE SCIENCE AND ENGINEERING OF MICROELECTRONIC FABRICATION
U1  - 621.38152 
PY  - 1996///
CY  - Newyork
PB  - Oxford University Press
KW  - physical constants
KW  - conversion factors
KW  - second order effects
N1  - index
ER  -