TY  - BOOK
AU  -  Hsu, Tai-Ran
TI  - MEMS and microsystems : : design and manufacture
SN  - 9780070487093
U1  - 621.381	 
PY  - 2016///
CY  - New Delhi
PB  - Mcgrawhill education pvt,Ltd.
N1  - "It includes bibliographical references(427-436) and index"
ER  -