Integrated circuit manufacturability: the art of process and design integration

By: Gyvez, Jose PinedaContributor(s): Pradhan, DhirajMaterial type: TextTextPublication details: New York: Institute of Electrical and electronics engineers, Inc. 1999Description: xv, 316p. 24cmISBN: 0780334477Subject(s): Defect modeling | Defect monitoring | Functional yield modelingDDC classification: 621.3815
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