THE SCIENCE AND ENGINEERING OF MICROELECTRONIC FABRICATION (Record no. 271965)
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| 000 -LEADER | |
|---|---|
| fixed length control field | 00523nam a22001817a 4500 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION | |
| fixed length control field | 220720b |||||||| |||| 00| 0 eng d |
| 082 ## - DEWEY DECIMAL CLASSIFICATION NUMBER | |
| Classification number | 621.38152 |
| Item number | CAM |
| 100 ## - MAIN ENTRY--PERSONAL NAME | |
| Personal name | Campbell, Stephen A. |
| 245 ## - TITLE STATEMENT | |
| Title | THE SCIENCE AND ENGINEERING OF MICROELECTRONIC FABRICATION |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. (IMPRINT) | |
| Place of publication, distribution, etc | Newyork: |
| Name of publisher, distributor, etc | Oxford University Press; |
| Date of publication, distribution, etc | 1996. |
| 300 ## - PHYSICAL DESCRIPTION | |
| Extent | xv, 529p. |
| Dimensions | 23cm. |
| 504 ## - BIBLIOGRAPHY, ETC. NOTE | |
| Bibliography, etc | index, |
| 563 ## - BINDING INFORMATION | |
| Binding note | soft binding. |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name as entry element | physical constants |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name as entry element | conversion factors |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name as entry element | second order effects |
| 942 ## - ADDED ENTRY ELEMENTS (KOHA) | |
| Item type | Books |
| Withdrawn status | Lost status | Source of classification or shelving scheme | Damaged status | Not for loan | Home library | Current library | Shelving location | Date acquired | Total Checkouts | Full call number | Barcode | Date last seen | Koha item type |
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
| University Visvesvarayya College of Engineering | University Visvesvarayya College of Engineering | On Display | 20/07/2022 | 621.38152 CAM | UV1388T | 20/07/2022 | Books | ||||||
| University Visvesvarayya College of Engineering | University Visvesvarayya College of Engineering | On Display | 20/07/2022 | 621.38152 CAM | UV1925T | 20/07/2022 | Books | ||||||
| University Visvesvarayya College of Engineering | University Visvesvarayya College of Engineering | On Display | 13/12/2022 | 621.38152 CAM | UV095977 | 13/12/2022 | Books |