MEMS and microsystems : design and manufacture

Hsu, Tai-Ran

MEMS and microsystems : design and manufacture Tai-Ran Hsu - New Delhi: Mcgrawhill education pvt,Ltd. 2016. - xii,436 p. 26 cm.

"It includes bibliographical references(427-436) and index"

9780070487093

621.381 / HSU

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