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Micromachines as tools for nanotechnology

Fujitha,H.

Micromachines as tools for nanotechnology H. Fujitha - New York Springer 2003. - xii, 211 ill. 24 cm. - Microtechnology and MEMS .

Includes bibliographical references.

ISBN: 354000856X (alk. paper

Subjects--Topical Terms:
Nanotechnology.
Microelectromechanical systems.

Dewey Class. No.: 620.521 / FUJ

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